一、金剛線切割工藝原理是什么
金剛線主要用于光伏晶硅等硬脆材料切割,是光伏硅片重要的耗材設備,現在常用的一般是電鍍金剛線,那么金剛線的(de)切割原理是什么呢?
金(jin)(jin)(jin)剛(gang)線(xian)由(you)母線(xian)、金(jin)(jin)(jin)屬(shu)鎳層(ceng)、金(jin)(jin)(jin)剛(gang)石顆(ke)粒三部分組(zu)成,以母線(xian)作為(wei)承載基體,金(jin)(jin)(jin)剛(gang)石顆(ke)粒作為(wei)磨粒刀具,金(jin)(jin)(jin)屬(shu)鍍層(ceng)作為(wei)結(jie)合劑(ji)將金(jin)(jin)(jin)剛(gang)石顆(ke)粒固結(jie)在母線(xian)上;切(qie)(qie)割時(shi),金(jin)(jin)(jin)剛(gang)線(xian)靠近被切(qie)(qie)割的材料(如硅(gui)棒或(huo)硅(gui)片(pian)),并通過(guo)高速旋轉和(he)研磨劑(ji)的使(shi)用,產生磨削效果,從而實現切(qie)(qie)割。
二、金剛石線切割工藝中的核心技術有哪些
金剛線切割技術仍(reng)將作為(wei)未來相當(dang)長一段(duan)時間內主(zhu)(zhu)流的(de)硅片切割技術,它的(de)切割工(gong)藝(yi)主(zhu)(zhu)要應用(yong)了以下(xia)16種技術:
1、高精度切割線管理技術
以(yi)金(jin)剛線(xian)(xian)(xian)(xian)切(qie)片(pian)(pian)機(ji)為例,切(qie)片(pian)(pian)機(ji)工(gong)作過程(cheng)中(zhong),金(jin)鋼線(xian)(xian)(xian)(xian)高速從放(fang)(fang)(fang)線(xian)(xian)(xian)(xian)輥(gun)放(fang)(fang)(fang)出,經過排(pai)(pai)線(xian)(xian)(xian)(xian)輪、張(zhang)力輪、過線(xian)(xian)(xian)(xian)輪和切(qie)割軸后,收(shou)(shou)回纏繞(rao)(rao)到收(shou)(shou)線(xian)(xian)(xian)(xian)輥(gun)上(shang);再反方向(xiang)由收(shou)(shou)線(xian)(xian)(xian)(xian)輥(gun)繞(rao)(rao)回到放(fang)(fang)(fang)線(xian)(xian)(xian)(xian)輥(gun),金(jin)剛線(xian)(xian)(xian)(xian)高速往(wang)復雙向(xiang)運(yun)動(dong)。原則(ze)上(shang)切(qie)片(pian)(pian)機(ji)工(gong)作過程(cheng)中(zhong),收(shou)(shou)線(xian)(xian)(xian)(xian)、放(fang)(fang)(fang)線(xian)(xian)(xian)(xian)及排(pai)(pai)布線(xian)(xian)(xian)(xian)須同步(bu)且(qie)金(jin)剛線(xian)(xian)(xian)(xian)所(suo)受(shou)到的張(zhang)力應保(bao)持穩(wen)定,然而(er)收(shou)(shou)、放(fang)(fang)(fang)線(xian)(xian)(xian)(xian)輥(gun)上(shang)繞(rao)(rao)制(zhi)的金(jin)剛線(xian)(xian)(xian)(xian)卷徑是(shi)隨(sui)時變化的,必須實(shi)時控(kong)制(zhi)收(shou)(shou)、放(fang)(fang)(fang)線(xian)(xian)(xian)(xian)輥(gun)的轉(zhuan)速以(yi)保(bao)證高速運(yun)動(dong)的金(jin)剛線(xian)(xian)(xian)(xian)的線(xian)(xian)(xian)(xian)速度穩(wen)定且(qie)保(bao)持金(jin)剛線(xian)(xian)(xian)(xian)所(suo)受(shou)到的張(zhang)力穩(wen)定;同時還需(xu)要保(bao)證排(pai)(pai)線(xian)(xian)(xian)(xian)裝置與收(shou)(shou)放(fang)(fang)(fang)線(xian)(xian)(xian)(xian)輥(gun)同步(bu)。
2、高精度張力控制技術
以金(jin)剛(gang)(gang)線(xian)(xian)(xian)(xian)(xian)切(qie)片機為(wei)例,切(qie)片機切(qie)割(ge)硅(gui)棒(bang)過程中,金(jin)剛(gang)(gang)線(xian)(xian)(xian)(xian)(xian)須保(bao)持穩定的切(qie)割(ge)張力(li)(li),若(ruo)張力(li)(li)過小,將導(dao)(dao)致(zhi)金(jin)剛(gang)(gang)線(xian)(xian)(xian)(xian)(xian)切(qie)割(ge)力(li)(li)不足;若(ruo)張力(li)(li)過大,將導(dao)(dao)致(zhi)金(jin)剛(gang)(gang)線(xian)(xian)(xian)(xian)(xian)斷線(xian)(xian)(xian)(xian)(xian);若(ruo)張力(li)(li)控制不穩定,或將導(dao)(dao)致(zhi)切(qie)出的硅(gui)片存在TTV超標、線(xian)(xian)(xian)(xian)(xian)痕明顯、硅(gui)片彎(wan)曲(qu)和翹曲(qu)等質(zhi)量(liang)問(wen)題(ti),嚴重時(shi)金(jin)剛(gang)(gang)線(xian)(xian)(xian)(xian)(xian)斷線(xian)(xian)(xian)(xian)(xian)或將導(dao)(dao)致(zhi)整根硅(gui)棒(bang)損壞。因(yin)此(ci),精確、靈敏、穩定、無擾動(dong)的切(qie)割(ge)線(xian)(xian)(xian)(xian)(xian)張力(li)(li)控制技術(shu)是金(jin)剛(gang)(gang)線(xian)(xian)(xian)(xian)(xian)切(qie)割(ge)技術(shu)的關鍵(jian)技術(shu)之一。
3、高精度夾持進給技術
切(qie)割設備工(gong)作時(shi)需要夾持被(bei)(bei)加(jia)工(gong)材料(liao)(liao)與切(qie)割刀(dao)具持續、穩(wen)(wen)定(ding)(ding)(ding)、緊密接觸,被(bei)(bei)加(jia)工(gong)材料(liao)(liao)進給的穩(wen)(wen)定(ding)(ding)(ding)性直接影響到(dao)切(qie)割的質量和效率;因此,夾持進給系統(tong)須具有高定(ding)(ding)(ding)位(wei)精度、高動態響應、高穩(wen)(wen)定(ding)(ding)(ding)性等特點(dian)。
4、多主軸動態平衡控制技術
單晶(jing)(jing)硅圓棒開方時,金(jin)(jin)(jin)剛(gang)線(xian)切割線(xian)網是由一(yi)根金(jin)(jin)(jin)剛(gang)線(xian)布成的(de)井字形線(xian)網,需(xu)要(yao)運用多(duo)主(zhu)(zhu)軸動態平衡控制技(ji)術來進行布線(xian)控制,以保證(zheng)開方機線(xian)網的(de)穩定(ding)運行。公司經過多(duo)年的(de)自主(zhu)(zhu)研發、實踐及持續(xu)優(you)化,率(lv)先(xian)將自主(zhu)(zhu)研發的(de)多(duo)主(zhu)(zhu)軸動態平衡控制技(ji)術應用于(yu)金(jin)(jin)(jin)剛(gang)線(xian)單晶(jing)(jing)開方機,使得金(jin)(jin)(jin)剛(gang)線(xian)單晶(jing)(jing)開方機主(zhu)(zhu)軸輪使用壽命延長、斷線(xian)率(lv)降(jiang)低、切割成本降(jiang)低。
5、高精度晶線檢測技術
晶線(xian)檢(jian)(jian)測(ce)(ce)是單晶硅棒(bang)開(kai)方的(de)重要工序(xu),晶線(xian)檢(jian)(jian)測(ce)(ce)的(de)成功(gong)與否(fou),會直接影響(xiang)切(qie)割質量和(he)切(qie)割效(xiao)(xiao)率。如(ru)(ru)果晶線(xian)檢(jian)(jian)測(ce)(ce)錯誤(wu)且繼續切(qie)割動作,會造成硅棒(bang)直接報廢;如(ru)(ru)果檢(jian)(jian)測(ce)(ce)用(yong)(yong)時(shi)過多,會降低切(qie)割效(xiao)(xiao)率。高精度晶線(xian)檢(jian)(jian)測(ce)(ce)技術,利用(yong)(yong)高精度傳(chuan)感(gan)器、多層(ceng)控制算法(fa)、閉環自動調整技術,可以保證(zheng)硅棒(bang)誤(wu)切(qie)率趨近于零(ling),晶線(xian)檢(jian)(jian)測(ce)(ce)成功(gong)率達99.9%,大(da)幅度縮(suo)短了(le)晶線(xian)檢(jian)(jian)測(ce)(ce)時(shi)間
6、超薄片切割工藝技術
該技術是通過優化切割工藝匹配、優化切割設備部套性能,實現高硬脆材料的薄片切割,從而降低成品片所需材料用量、提升成品片柔韌性的切割工藝技術。以光伏用(yong)單晶硅片為例,超薄片技術(shu)路線是(shi)面向光伏平(ping)價上(shang)網(wang)的主要(yao)解決(jue)方案之一(yi),針對(dui)下一(yi)代電池技術(shu)具(ju)有明(ming)顯的性價比優(you)勢(shi),片厚的下降(jiang)帶來硅片柔性的提高,組件(jian)的應(ying)用(yong)場(chang)景也相應(ying)提升,高轉換效率(lv)和低成本的材料有利于客(ke)戶產品提升競爭力。
7、基于大數據算法的切割過程工藝自適應技術
該(gai)技術通過算法、數據、切(qie)割工藝調(diao)整邏(luo)輯,使得(de)切(qie)割類(lei)設備在一定(ding)程度上具(ju)備模擬(ni)切(qie)割工藝人員(yuan)對切(qie)割過程出現(xian)的復雜問題的識別、學(xue)習和解(jie)決能(neng)力(li),使得(de)切(qie)割裝備智(zhi)能(neng)地(di)針對切(qie)割過程中遇到的金剛(gang)線、輔料、裝備等(deng)出現(xian)的異常(chang)情況給出快速、精(jing)確、可(ke)重復的處(chu)理措施(shi),從而降低斷線率、提升(sheng)生產效率、提高切(qie)片(pian)良率。
8、超細金剛線高線速切割工藝技術
該技(ji)術是通(tong)過優化金剛線切(qie)割(ge)相關(guan)工(gong)(gong)藝參(can)數(shu),力求使用線徑更細(xi)的(de)金剛線切(qie)割(ge),從而降(jiang)低(di)制造(zao)硅片所需(xu)的(de)材料用量、提(ti)(ti)升切(qie)片良(liang)率(lv)、提(ti)(ti)高切(qie)割(ge)生產效(xiao)率(lv)、降(jiang)低(di)固定資產投資成(cheng)本(ben)的(de)切(qie)割(ge)工(gong)(gong)藝技(ji)術。
9、高精度軸承箱設計制造技術
以金剛線切片機為例,切片機兩根切割主輥帶動金剛線網在硅棒表面高速往復磨削,將硅棒切削加工為硅片。兩根切割主輥由軸承支撐起來高速旋轉,軸承則安裝在兩根主輥前后四個軸承箱中。切割主輥轉動產生的軸向和徑向力將導致切片機在微米級切割狀態下出現切割精度波動,并進而影響生產效率及硅片質量。軸(zhou)(zhou)(zhou)承(cheng)(cheng)箱(xiang)(xiang)(xiang)在(zai)上(shang)述切割(ge)主(zhu)(zhu)軸(zhou)(zhou)(zhou)工作(zuo)過程中起到支(zhi)撐和(he)保(bao)持精(jing)(jing)度(du)的(de)關鍵作(zuo)用,一(yi)(yi)方(fang)面(mian),切割(ge)主(zhu)(zhu)輥將(jiang)高速旋轉工作(zuo)時承(cheng)(cheng)受(shou)的(de)軸(zhou)(zhou)(zhou)向和(he)徑(jing)向力(li)傳遞到軸(zhou)(zhou)(zhou)承(cheng)(cheng)箱(xiang)(xiang)(xiang)上(shang),由軸(zhou)(zhou)(zhou)承(cheng)(cheng)箱(xiang)(xiang)(xiang)的(de)力(li)學結構承(cheng)(cheng)載并(bing)化解;另一(yi)(yi)方(fang)面(mian),軸(zhou)(zhou)(zhou)承(cheng)(cheng)箱(xiang)(xiang)(xiang)精(jing)(jing)度(du)和(he)剛度(du)保(bao)證了(le)金剛線(xian)網的(de)運(yun)行精(jing)(jing)度(du),從而保(bao)證了(le)硅片切割(ge)質量。
10、高穩定性液路技術
在(zai)金(jin)剛線切(qie)片(pian)機工作過程(cheng)中,金(jin)剛線切(qie)割硅(gui)片(pian)時(shi)會(hui)(hui)持(chi)續產生(sheng)大量的熱(re)(re)量,若大量熱(re)(re)聚集則會(hui)(hui)使高精度軸承箱和(he)硅(gui)棒(bang)發生(sheng)熱(re)(re)變形,進而(er)降低切(qie)片(pian)機的工作精度、降低硅(gui)片(pian)的質量。因此(ci),軸承箱和(he)硅(gui)棒(bang)所(suo)在(zai)的切(qie)割區域需進行(xing)循(xun)環(huan)冷卻,以帶走切(qie)割硅(gui)棒(bang)產生(sheng)的熱(re)(re)量,并保證切(qie)割區域溫度恒定。
11、低張力高效上砂技術
“低張(zhang)(zhang)力(li)(li)(li)高效(xiao)上砂(sha)(sha)技術(shu)”主要是指“分段(duan)張(zhang)(zhang)力(li)(li)(li)系統”和“單(dan)機(ji)(ji)十(shi)二線(xian)(xian)(xian)設計(ji)技術(shu)(原單(dan)機(ji)(ji)六(liu)線(xian)(xian)(xian)設計(ji)技術(shu))”。“分段(duan)張(zhang)(zhang)力(li)(li)(li)系統”是指在金剛線(xian)(xian)(xian)生產線(xian)(xian)(xian)主要工藝段(duan)設置(zhi)驅動電(dian)機(ji)(ji)和張(zhang)(zhang)力(li)(li)(li)電(dian)機(ji)(ji),中(zhong)間工藝段(duan)電(dian)機(ji)(ji)為(wei)主軸(zhou)電(dian)機(ji)(ji),其他電(dian)機(ji)(ji)為(wei)從軸(zhou)跟隨(sui)主軸(zhou)同步(bu),金剛線(xian)(xian)(xian)生產線(xian)(xian)(xian)各工藝段(duan)的(de)鋼(gang)(gang)線(xian)(xian)(xian)張(zhang)(zhang)力(li)(li)(li)控制是獨立的(de),從而可以實現低張(zhang)(zhang)力(li)(li)(li)上砂(sha)(sha),減少(shao)鋼(gang)(gang)線(xian)(xian)(xian)因大張(zhang)(zhang)力(li)(li)(li)磨損而導致的(de)脫砂(sha)(sha)情況,有利于(yu)高質量上砂(sha)(sha)。
12、機器視覺圖像識別技術
“機器視(shi)覺圖(tu)像(xiang)識(shi)別(bie)系統”通過高速工(gong)業像(xiang)機在(zai)線(xian)(xian)(xian)實(shi)(shi)時(shi)(shi)拍攝固(gu)結在(zai)鋼線(xian)(xian)(xian)基體(ti)上單(dan)位(wei)視(shi)野內的(de)(de)(de)金(jin)(jin)剛(gang)石微(wei)粉顆粒的(de)(de)(de)顯微(wei)圖(tu)像(xiang),圖(tu)像(xiang)信(xin)號(hao)實(shi)(shi)時(shi)(shi)傳送給圖(tu)像(xiang)處(chu)理(li)系統并(bing)轉換(huan)為數(shu)(shu)(shu)字(zi)化信(xin)號(hao),數(shu)(shu)(shu)字(zi)化的(de)(de)(de)圖(tu)像(xiang)信(xin)號(hao)被金(jin)(jin)剛(gang)線(xian)(xian)(xian)生(sheng)(sheng)(sheng)產線(xian)(xian)(xian)檢(jian)(jian)測(ce)控制系統實(shi)(shi)時(shi)(shi)接(jie)收(shou),并(bing)實(shi)(shi)時(shi)(shi)計算鋼線(xian)(xian)(xian)基體(ti)上單(dan)位(wei)視(shi)野內的(de)(de)(de)金(jin)(jin)剛(gang)石微(wei)粉顆粒數(shu)(shu)(shu)量、分布(bu)均勻性(xing)的(de)(de)(de)分析數(shu)(shu)(shu)據(ju),從而實(shi)(shi)現對(dui)金(jin)(jin)剛(gang)線(xian)(xian)(xian)上固(gu)結的(de)(de)(de)金(jin)(jin)剛(gang)石微(wei)粉顆粒數(shu)(shu)(shu)量、分布(bu)均勻性(xing)的(de)(de)(de)實(shi)(shi)時(shi)(shi)在(zai)線(xian)(xian)(xian)檢(jian)(jian)測(ce),并(bing)將實(shi)(shi)時(shi)(shi)在(zai)線(xian)(xian)(xian)檢(jian)(jian)測(ce)數(shu)(shu)(shu)據(ju)與(yu)生(sheng)(sheng)(sheng)產工(gong)藝設定數(shu)(shu)(shu)據(ju)比(bi)較,實(shi)(shi)時(shi)(shi)調(diao)整金(jin)(jin)剛(gang)線(xian)(xian)(xian)生(sheng)(sheng)(sheng)產線(xian)(xian)(xian)的(de)(de)(de)生(sheng)(sheng)(sheng)產工(gong)藝參數(shu)(shu)(shu),進而實(shi)(shi)現對(dui)金(jin)(jin)剛(gang)線(xian)(xian)(xian)上固(gu)結的(de)(de)(de)金(jin)(jin)剛(gang)石微(wei)粉顆粒數(shu)(shu)(shu)量、分布(bu)均勻性(xing)的(de)(de)(de)實(shi)(shi)時(shi)(shi)控制。
13、砂量模糊控制技術
“砂(sha)(sha)量(liang)(liang)模糊(hu)控(kong)(kong)制系統”以金(jin)剛線生產大數(shu)據(ju)為基(ji)礎,建立各影響因素與砂(sha)(sha)量(liang)(liang)的模糊(hu)控(kong)(kong)制規則,采用模糊(hu)推理、模糊(hu)判斷、數(shu)學仿真分析等技術解(jie)析控(kong)(kong)制量(liang)(liang),從而實現對(dui)上砂(sha)(sha)量(liang)(liang)的精確控(kong)(kong)制,無需人(ren)工干(gan)預上砂(sha)(sha)量(liang)(liang)。
14、電鍍液高效添加劑技術
上(shang)砂(sha)(sha)(sha)過程是金(jin)(jin)剛線(xian)生(sheng)產的核心工藝流程,上(shang)砂(sha)(sha)(sha)的效率(速度)直(zhi)接影響金(jin)(jin)剛線(xian)的生(sheng)產速度;上(shang)砂(sha)(sha)(sha)過程中金(jin)(jin)剛石微粉(fen)顆粒在母線(xian)上(shang)分布(bu)的均勻性(xing)(xing)直(zhi)接影響金(jin)(jin)剛線(xian)的質量一致(zhi)性(xing)(xing)。因此為了保證(zheng)高速上(shang)砂(sha)(sha)(sha)和均勻上(shang)砂(sha)(sha)(sha)(不(bu)團聚、不(bu)疊(die)砂(sha)(sha)(sha)),上(shang)砂(sha)(sha)(sha)槽中添加劑和使用方(fang)法非常(chang)重要。
15、金剛石微粉鍍覆技術
金剛石微粉顆粒本身不導電,為使得金剛石微粉顆粒能夠在電鍍的機理下固結在母線上,一般是采用化學鍍的方法在金剛石顆粒表面包覆金屬鎳進行表面金屬化處理。但金剛線生產過程中的(de)電(dian)鍍液(ye)環境(jing)是(shi)酸性的(de),會腐(fu)蝕金(jin)(jin)剛(gang)(gang)(gang)石(shi)顆(ke)粒表(biao)面(mian)的(de)金(jin)(jin)屬鎳層(ceng),使得金(jin)(jin)剛(gang)(gang)(gang)石(shi)顆(ke)粒表(biao)面(mian)的(de)金(jin)(jin)屬鎳層(ceng)脫落或(huo)金(jin)(jin)剛(gang)(gang)(gang)石(shi)顆(ke)粒與(yu)母線基體結(jie)合力減弱,進(jin)而降低(di)金(jin)(jin)剛(gang)(gang)(gang)線的(de)質(zhi)量以及(ji)改變(bian)電(dian)鍍液(ye)的(de)成分(fen)。
16、金剛石微粉后處理技術
金(jin)(jin)(jin)(jin)(jin)剛(gang)(gang)(gang)線(xian)(xian)生產過程中(zhong)(zhong),在(zai)(zai)金(jin)(jin)(jin)(jin)(jin)剛(gang)(gang)(gang)石(shi)微粉(fen)顆(ke)粒固(gu)(gu)結(jie)到鋼(gang)線(xian)(xian)基(ji)(ji)(ji)體表(biao)面后(hou),鍍液中(zhong)(zhong)的鎳(nie)離(li)子將在(zai)(zai)電鍍作用下持續移向鋼(gang)線(xian)(xian)基(ji)(ji)(ji)體獲得電子還(huan)原為金(jin)(jin)(jin)(jin)(jin)屬鎳(nie),并(bing)同時將金(jin)(jin)(jin)(jin)(jin)剛(gang)(gang)(gang)石(shi)微粉(fen)顆(ke)粒固(gu)(gu)結(jie)在(zai)(zai)鋼(gang)線(xian)(xian)基(ji)(ji)(ji)體表(biao)面,因此金(jin)(jin)(jin)(jin)(jin)剛(gang)(gang)(gang)線(xian)(xian)外表(biao)層的金(jin)(jin)(jin)(jin)(jin)屬鎳(nie)鍍層是(shi)決定(ding)(ding)了(le)金(jin)(jin)(jin)(jin)(jin)剛(gang)(gang)(gang)石(shi)顆(ke)粒在(zai)(zai)鋼(gang)線(xian)(xian)基(ji)(ji)(ji)體上的固(gu)(gu)結(jie)能力,進(jin)而決定(ding)(ding)了(le)金(jin)(jin)(jin)(jin)(jin)剛(gang)(gang)(gang)線(xian)(xian)的切割能力,金(jin)(jin)(jin)(jin)(jin)剛(gang)(gang)(gang)石(shi)顆(ke)粒在(zai)(zai)鋼(gang)線(xian)(xian)基(ji)(ji)(ji)體上的固(gu)(gu)結(jie)能力是(shi)金(jin)(jin)(jin)(jin)(jin)剛(gang)(gang)(gang)線(xian)(xian)最重(zhong)要的技(ji)術(shu)指標之(zhi)一(yi)。