一、ITO靶材是什么材料
ITO靶材,全稱為氧化銦錫靶材,是電子信息工業領域的關鍵材料之一。氧化銦錫(英文全稱為Indium Tin Oxide,簡稱“ITO”),由氧化銦和氧化錫粉末按照一定比例混合后,經過一系列的生產工藝加工成型,再高溫燒結形成的黑灰色陶瓷半導體材料。薄薄的(de)氧化銦(yin)(yin)錫在(zai)可見(jian)光范圍(wei)內呈現(xian)透(tou)(tou)明(ming)狀。不過(guo)在(zai)紅外光線下,氧化銦(yin)(yin)錫層起著(zhu)不透(tou)(tou)明(ming)的(de)作用,反射紅外線。
氧化(hua)銦錫作為(wei)一種n型半導(dao)(dao)體(ti)材料,具有高的導(dao)(dao)電(dian)率、優異的可見光透過(guo)率、較強的機械硬度和良好(hao)的化(hua)學穩(wen)定性,主要用(yong)于制作液晶顯示器(qi)(qi)、平板顯示器(qi)(qi)、等離子(zi)顯示器(qi)(qi)、觸(chu)摸(mo)屏(ping)、電(dian)子(zi)紙、有機發(fa)光二(er)極管、太陽能電(dian)池、抗靜(jing)電(dian)鍍(du)(du)膜、EMI屏(ping)蔽的透明傳導(dao)(dao)鍍(du)(du)、各種光學鍍(du)(du)膜等。
ITO靶(ba)材(cai)(cai)是濺射(she)靶(ba)材(cai)(cai)中的(de)一種,主要通過磁控濺射(she)將ITO靶(ba)材(cai)(cai)氣(qi)化,濺鍍到(dao)玻璃基(ji)板或柔性有(you)機薄膜(mo)上,制(zhi)造(zao)成ITO薄膜(mo),后(hou)者為透明導(dao)電氧化物薄膜(mo),厚度一般為30-200納米。
二、ITO靶材應用領域
1、平板顯示器(純度5N)
在平板顯示領域,ITO靶材主要用于制作ITO導電(dian)(dian)玻(bo)璃及觸(chu)控屏電(dian)(dian)極平(ping)(ping)板(ban),是(shi)LCD、PDP、OLED、觸(chu)摸屏等各類平(ping)(ping)板(ban)顯(xian)示(shi)器件制備的核心(xin)材料(liao)。顯(xian)示(shi)面板(ban)一般(ban)涉及上下(xia)兩層ITO導電(dian)(dian)膜,用量(liang)(liang)較大,ITO靶材是(shi)平(ping)(ping)板(ban)顯(xian)示(shi)領域用量(liang)(liang)最大的靶材之一。
ITO導(dao)電(dian)(dian)(dian)(dian)膜玻(bo)(bo)(bo)璃(li)按電(dian)(dian)(dian)(dian)阻分(fen)為(wei):高電(dian)(dian)(dian)(dian)阻玻(bo)(bo)(bo)璃(li)(電(dian)(dian)(dian)(dian)阻范(fan)圍在150~500歐(ou)姆(mu))、普(pu)通玻(bo)(bo)(bo)璃(li)(電(dian)(dian)(dian)(dian)阻范(fan)圍在60~150歐(ou)姆(mu))、低(di)電(dian)(dian)(dian)(dian)阻玻(bo)(bo)(bo)璃(li)(電(dian)(dian)(dian)(dian)阻范(fan)圍小于60歐(ou)姆(mu))。其(qi)中高電(dian)(dian)(dian)(dian)阻玻(bo)(bo)(bo)璃(li)一(yi)(yi)般(ban)用于靜電(dian)(dian)(dian)(dian)防護、觸控屏幕制作用;普(pu)通玻(bo)(bo)(bo)璃(li)一(yi)(yi)般(ban)用于TN類液(ye)晶顯(xian)(xian)示器和電(dian)(dian)(dian)(dian)子抗干擾;低(di)電(dian)(dian)(dian)(dian)阻玻(bo)(bo)(bo)璃(li)一(yi)(yi)般(ban)用于STN、TFT液(ye)晶顯(xian)(xian)示器和透明線(xian)路板。
LCD面(mian)板(ban)(ban)組件總厚度不到1公分,內(nei)部包含20多項材(cai)料及(ji)元件。不同類型LCD所需材(cai)料不盡相同,但(dan)基本(ben)結(jie)構(gou)類似,即在(zai)ITO導電膜玻璃(li)內(nei)夾(jia)著彩色濾光(guang)片(pian)、偏(pian)光(guang)板(ban)(ban)、配向膜等材(cai)料,灌(guan)入液(ye)晶材(cai)料,后封(feng)裝成一個液(ye)晶盒(he)。因(yin)此,ITO導電膜玻璃(li)作(zuo)為LCD面(mian)板(ban)(ban)的(de)關(guan)鍵基礎材(cai)料,約占(zhan)(zhan)LCD面(mian)板(ban)(ban)材(cai)料成本(ben)的(de)30%,而ITO靶材(cai)約占(zhan)(zhan)導電玻璃(li)成本(ben)的(de)20%。
2、薄膜太陽能電池(純度4N)
ITO是一種透(tou)明導電(dian)(dian)(dian)層,在太陽(yang)能電(dian)(dian)(dian)池(chi)中作(zuo)為(wei)(wei)透(tou)光層,同時(shi)作(zuo)為(wei)(wei)電(dian)(dian)(dian)極(ji)(ji)(ji),一般為(wei)(wei)正極(ji)(ji)(ji),另一個電(dian)(dian)(dian)極(ji)(ji)(ji)一般以金屬銀或鋁作(zuo)為(wei)(wei)背電(dian)(dian)(dian)極(ji)(ji)(ji)使用(yong)。ITO靶材主(zhu)要(yao)用(yong)于(yu)生成(cheng)太陽(yang)能薄膜電(dian)(dian)(dian)池(chi)的背電(dian)(dian)(dian)極(ji)(ji)(ji),主(zhu)要(yao)需求(qiu)為(wei)(wei)方形板狀(zhuang)靶材。
3、保溫透光領域
ITO透(tou)明導電(dian)膜(mo)玻璃(li)作(zuo)為面(mian)(mian)發(fa)熱體,通電(dian)后(hou)可以除冰霜,用(yong)(yong)(yong)于飛機擋(dang)風玻璃(li)、飛機眩窗(chuang)、激光測距儀、潛望鏡觀察窗(chuang)等(deng),多年來已得到了廣泛的(de)應用(yong)(yong)(yong)。ITO透(tou)明導電(dian)膜(mo)玻璃(li)正反(fan)面(mian)(mian)具(ju)(ju)有(you)(you)相反(fan)的(de)紅(hong)(hong)外(wai)線(xian)通過及反(fan)射性能(neng),玻璃(li)正面(mian)(mian)具(ju)(ju)有(you)(you)優良(liang)的(de)紅(hong)(hong)外(wai)線(xian)通過性,衰減量極小,而反(fan)面(mian)(mian)又具(ju)(ju)有(you)(you)紅(hong)(hong)外(wai)線(xian)阻擋(dang)反(fan)射作(zuo)用(yong)(yong)(yong),因而該種玻璃(li)具(ju)(ju)有(you)(you)優良(liang)的(de)保溫(wen)透(tou)光性能(neng),已大量用(yong)(yong)(yong)于制造冷藏柜,隨著成本(ben)的(de)降(jiang)低將(jiang)有(you)(you)望用(yong)(yong)(yong)于房屋節能(neng)。